| 摘要 |
<p>A displacement sensor provided with a magnet (4) and magnetoelectric conversion means for sensing the variation of magnetism caused by the magnet to sense the displacement of the magnetic material to be measured. The sensor is provided with a first magnetoelectric conversion means (5) located in the place where the magnetic flux density is varied by the displacement of the material to be measured, a second magnetoelectric conversion means (6) of the same kind as the first magnetoelectric conversion means (5), which is located in the place where the magnetic flux density is not varied by the displacement of the material to be measured, and a circuit means (10) for adding the outputs of the first and second magnetoelectric conversion means at a predetermined ratio. Further, by using the displacement sensor as a base and by adjusting the temperature coefficients of the first and second magnetoelectric conversion means (5), (6), or by adjusting the temperature coefficient of the circuit means (10), the temperature compensation of the displacement sensor is so performed that its temperature coefficient approaches zero. Thereby, its sensing accuracy can be improved in a wide temperature range. The magnet (4), the first and second magnetoelectric conversion means (5), (6), and the circuit means (10) are contained in a case (21) having a heatinsulating structure so that the temperature in the case is kept constant independently of the temperature of the external environment. Optionally by using a case (21) of a material having a high thermal conductivity, the displacement sensor can respond at a high speed to the temperature of the external environment.</p> |
