Process for forming negative tone images of polyimides for integrated circuit manufacture.

摘要

The present invention relates to an improved process for forming a negative tone image of polyimide on a substrate comprising the steps of: (a) coating the substrate with a film comprising polyamic ester and a photoinitiator: (b) imagewise exposing the film to radiation to imagewise insolubilize the polyamic ester; (c) developing the image; (d) contacting the film with a base; and (e) heating the film to imidize said insolubilized polyamic ester.