发明名称 PROCESS FOR PRODUCING PIEZO-ELECTRIC ABSORPTION MOISTURE-CONTENT INDICATING SENSOR
摘要 The invention concerns the production of a piezo-electric absorption moisture-content indicating sensor for a piezo-electric oscillating silica cut (1), equipped with metal electrodes (2a, 3a), which is applied with a layer (10, 11) of pure aluminium Al at a thickness of 0.5 to 10 μm, then a moisture sensitive layer (12, 13) is formed of porous oxyaluminum hydroxide Al0(OH) with a thickness of 0.3 to 0.5 μm. The moisture sensitive layer (12, 13) of porous oxyaluminum hydroxide Al0(OH) is prepared by surface hydration of the layer (10, 11) of pure aluminium Al in boiling redistilled or deionised water and then the moisture sensitive layer (12, 13) is passivated by wetting in an aqueous solution of sodium dihydrogen phosphate NaH2P04.2H20 at a concentration of 0.01 to 1 mol at a temperature of 35 to 100 degrees C for a period of 5 to 60 minutes. Then it is tempered in a gaseous environment chemically inert towards the layer (12, 13) for a period from 2 to 24 hours at a temperature of 70 to 110 degrees C.<IMAGE>
申请公布号 CZ278171(B6) 申请公布日期 1993.09.15
申请号 CS19900006900 申请日期 1990.12.29
申请人 MATEMATICKO-FYZIKALNI FAKULTA UK 发明人 EMMER IVAN RNDR. CSC.
分类号 G01N19/10;G01N29/00;(IPC1-7):G01N19/10 主分类号 G01N19/10
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