Micromechanics forming method and micromechanics

摘要

A new method for forming on a substrate such micomechanics as a micro link mechanism by means of micromachining. The new method includes a process of implanting carbon ions to improve frictional properties of at least a slidable portion of the micromechanics formed. Micomechanics having their slidable portion made of a compound of silicon and such a dopant as carbon.