发明名称 |
PROCESS FOR DEPOSITING A THIN LAYER OF A CERAMIC COMPOSITION AND A PRODUCT OBTAINED THEREBY |
摘要 |
A process for depositing a thin layer of a ceramic composition on a substrate, which comprises: a) dissolving basic constituents of the ceramic composition, which are added in simple or mixed form to a solvent; b) adding to the solution, acetylacetone and hexamethylene tetramine in proportions suitable to the deposit method used; c) maturing or polymerizing the substance obtained in step b); d) depositing a layer of the substance on a substrate; e) drying the deposited layer, and f) sintering the layer deposited at low temperature.
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申请公布号 |
US5244691(A) |
申请公布日期 |
1993.09.14 |
申请号 |
US19900616081 |
申请日期 |
1990.11.20 |
申请人 |
THOMSON-CSF |
发明人 |
VALENTE, ISABELLE (WIFE CAMPION);FAURE, SYLVAIN;GAUCHER, PHILIPPE;LIVAGE, JACQUES |
分类号 |
C04B41/52;C04B41/89;C23C18/12;H01L21/00;H01L21/314;H01L21/316 |
主分类号 |
C04B41/52 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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