发明名称 PROCESS FOR DEPOSITING A THIN LAYER OF A CERAMIC COMPOSITION AND A PRODUCT OBTAINED THEREBY
摘要 A process for depositing a thin layer of a ceramic composition on a substrate, which comprises: a) dissolving basic constituents of the ceramic composition, which are added in simple or mixed form to a solvent; b) adding to the solution, acetylacetone and hexamethylene tetramine in proportions suitable to the deposit method used; c) maturing or polymerizing the substance obtained in step b); d) depositing a layer of the substance on a substrate; e) drying the deposited layer, and f) sintering the layer deposited at low temperature.
申请公布号 US5244691(A) 申请公布日期 1993.09.14
申请号 US19900616081 申请日期 1990.11.20
申请人 THOMSON-CSF 发明人 VALENTE, ISABELLE (WIFE CAMPION);FAURE, SYLVAIN;GAUCHER, PHILIPPE;LIVAGE, JACQUES
分类号 C04B41/52;C04B41/89;C23C18/12;H01L21/00;H01L21/314;H01L21/316 主分类号 C04B41/52
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