发明名称
摘要 PURPOSE:To detect the end point of a reaction accurately by detecting luminous intensity in succession at short sampling time, comparing luminous intensity at that time and one on sampling before plural times and obtaining a variation section between both luminous intensity. CONSTITUTION:An output from a photocell 9 is transmitted over a memory circuit 12 by a detecting circuit at short intervals set by a timer 11. The memory circuit 12 memorizes luminous intensity signals in succession. A comparison circuit 13 compares the latest signal inputted to the memory circuit 12 and a signal, which is inputted before plural times and memorized, and calculates a variation section between both signals. A decision circuit 14 decides an end point on the basis of the variation section of luminous intensity obtained by the comparison circuit 13.
申请公布号 JPH0564455(B2) 申请公布日期 1993.09.14
申请号 JP19830204816 申请日期 1983.11.02
申请人 HITACHI LTD 发明人 KOTANI TETSUJIRO
分类号 H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):H01L21/302 主分类号 H01L21/205
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