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经营范围
发明名称
WAFER INSPECTING DEVICE
摘要
申请公布号
JPH05234971(A)
申请公布日期
1993.09.10
申请号
JP19910358061
申请日期
1991.12.27
申请人
SHIN ETSU HANDOTAI CO LTD;NAGANO DENSHI KOGYO KK
发明人
YOSHIZAWA KATSUO;OKADA MAMORU;OKI YOSHI
分类号
B23Q17/20;G01N21/88;G01N21/956;H01L21/304;H01L21/66;(IPC1-7):H01L21/304
主分类号
B23Q17/20
代理机构
代理人
主权项
地址
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