| 摘要 |
<p>PURPOSE:To make it possible to employ a planar pallet by constituting a track of a plurality of yoke poles having substantially U-shaped cross-section and arranging units, each comprising a plurality of yoke poles, in series in the traveling direction of the pallet. CONSTITUTION:A plurality of yoke poles 12 constitute a unit and such units are arranged in series in the traveling direction of a pallet(floating board) 18 which is levitated from the bottom of a bulkhead 10 when a coil 16 is conducted to excite the yoke pole 12. When a moving field is generated, the floating board 18 follows up the moving field while levitating. Since the nonmagnetic bulkhead 10 is mounted on the U-shaped yoke pole 12, a field 26 is produced and a force for sustaining balance in the horizontal direction H is imparted. Consequently, even a planar floating board 18 can travel while levitating without vibrating in the horizontal direction H.</p> |
