METHOD AND DEVICE FOR SENSING POSITION

摘要

PURPOSE:To provide a position sensing method and a position sensor having higher positional resolution regardless of the size of the capacitor (a light- receiving section) of a CCD. CONSTITUTION:The position of a CCD 1 is moved by an XY table 2. A system controller 11 monitors an intensity change obtained by a signal processor 10, and arithmetically operates the position of incident electromagnetic waves from a travel and the direction of movement from an origin of the CCD 1 at a time when intensity is changed. Even when the diameter of electromagnetic waves is smaller than the size of the capacitor of the CCD 1, the incident position of electromagnetic waves can be detected with high accuracy.