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发明名称
SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要
申请公布号
JPH05235160(A)
申请公布日期
1993.09.10
申请号
JP19920039008
申请日期
1992.02.26
申请人
TOSHIBA CORP
发明人
NAKAYAMA RYOZO
分类号
H01L21/76;(IPC1-7):H01L21/76
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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