DIFFUSION AND REACTION EQUIPMENT OF SEMICONDUCTOR DEVICE,申请号JP19920070164-传众专利搜索

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发明名称	DIFFUSION AND REACTION EQUIPMENT OF SEMICONDUCTOR DEVICE
摘要
申请公布号	JPH05234926(A)	申请公布日期	1993.09.10
申请号	JP19920070164	申请日期	1992.02.19
申请人	RICOH CO LTD	发明人	KAMINO SATOSHI
分类号	H01L21/22;(IPC1-7):H01L21/22	主分类号	H01L21/22
代理机构		代理人
主权项
地址

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