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发明名称
ION PROCESSING DEVICE
摘要
申请公布号
JPH05234563(A)
申请公布日期
1993.09.10
申请号
JP19920069567
申请日期
1992.02.19
申请人
NISSIN ELECTRIC CO LTD
发明人
NAITO KATSUO
分类号
H01J37/317;C23C14/48;H01L21/265;(IPC1-7):H01J37/317
主分类号
H01J37/317
代理机构
代理人
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地址
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