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经营范围
发明名称
COATER
摘要
申请公布号
JPH05234869(A)
申请公布日期
1993.09.10
申请号
JP19920017391
申请日期
1992.02.03
申请人
NEC CORP
发明人
UEDA YUTAKA
分类号
G03F7/16;H01L21/027;(IPC1-7):H01L21/027
主分类号
G03F7/16
代理机构
代理人
主权项
地址
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