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经营范围
发明名称
ION IMPLANTING DEVICE
摘要
申请公布号
JPH05234561(A)
申请公布日期
1993.09.10
申请号
JP19920033070
申请日期
1992.02.20
申请人
MATSUSHITA ELECTRON CORP
发明人
HAYASHI TAKESHI
分类号
C23C14/54;C23C14/48;C23C14/56;H01J37/317;H01L21/265;(IPC1-7):H01J37/317
主分类号
C23C14/54
代理机构
代理人
主权项
地址
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