MANUFACTURE FOR FERROELECTRIC THIN FILM,申请号JP19920240908-传众专利搜索

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发明名称	MANUFACTURE FOR FERROELECTRIC THIN FILM
摘要
申请公布号	JPH05235268(A)	申请公布日期	1993.09.10
申请号	JP19920240908	申请日期	1992.09.09
申请人	SEIKO EPSON CORP	发明人	SHIMADA KATSUTO
分类号	H01B3/00;C23C14/08;H01B3/12;H01L21/822;H01L21/8246;H01L21/8247;H01L27/04;H01L27/105;H01L29/788;H01L29/792;(IPC1-7):H01L27/04	主分类号	H01B3/00
代理机构		代理人
主权项
地址

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