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发明名称
VERFAHREN ZUR HERSTELLUNG EINES III-V-HALBLEITERBAUELEMENTES.
摘要
申请公布号
DE3785837(T2)
申请公布日期
1993.09.09
申请号
DE19873785837T
申请日期
1987.03.26
申请人
GEC-MARCONI LTD., STANMORE, GB
发明人
HAYES, ROGER, CARLTON, NORTHAMPTON NN1 4LU, GB
分类号
H01L21/285;H01L21/335;H01L21/338;H01L21/768;H01L29/72;H01L29/737;H01L29/778;H01L29/80;H01L29/808;(IPC1-7):H01L21/90
主分类号
H01L21/285
代理机构
代理人
主权项
地址
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