发明名称
摘要 A multiplicity of microwave semiconductor components can be produced by coating a surface of a semiconductor material body with a thin heat dissipation layer, then masking certain areas of the heat sink layer and coating the unmasked areas of the heat sink layer to form a carrier layer. Extensive parts of the semiconductor material body are then removed, thereby producing a multiplicity of mesa-structured diodes, at least one of which is in each case situated in that part of the semiconductor material body which is associated in each case with a masked area of the heat sink layer. Consequently, each mesa-structured diode has, or groups of mesa-structured diodes have in each case, a thin heat sink layer on one side, the mesa-structured diodes being mounted on a carrier layer to enable them to be handled subsequently. There are electrodes on the mesa-structured diodes to produce the connections. The individual diodes or diode groups are then separated from the carrier layer so that individual diodes or individual groups of diodes are obtained.
申请公布号 DE3243307(C2) 申请公布日期 1993.09.09
申请号 DE19823243307 申请日期 1982.11.23
申请人 RAYTHEON CO., LEXINGTON, MASS., US 发明人 ADLERSTEIN, MICHAEL G., WELLESLEY, MASS., US
分类号 H01L21/78;H01L23/043;H01L25/07 主分类号 H01L21/78
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