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发明名称
摘要
申请公布号	JPH0562712(B2)	申请公布日期	1993.09.09
申请号	JP19850062122	申请日期	1985.03.28
申请人	TOKYO SHIBAURA ELECTRIC CO	发明人	HATAYAMA TAMOTSU
分类号	G01J1/02;G01T1/20;G01T1/24;H01L31/00;H01L31/09;(IPC1-7):G01T1/24	主分类号	G01J1/02
代理机构		代理人
主权项
地址

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