| 发明名称 |
Energy resolved emission microscopy system and method. |
| 摘要 |
<p>An emission microscope system includes in various embodiments a catadioptric optical microscope and/or a computer automated optical dispensing system and/or a cryogenically cooled back thinned CCD camera. The system also includes a computer controlled data acquisition system with specially tailored software. <IMAGE></p> |
| 申请公布号 |
EP0559313(A1) |
申请公布日期 |
1993.09.08 |
| 申请号 |
EP19930300288 |
申请日期 |
1993.01.18 |
| 申请人 |
ADVANCED MICRO DEVICES, INC. |
发明人 |
BRUCE, VICTORIA J. |
| 分类号 |
G01R31/302;G01J3/28;G01J3/443;G01N21/62;G02B21/00;H01L21/66 |
主分类号 |
G01R31/302 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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