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发明名称
SPUTTERING APPARATUS
摘要
申请公布号
JPH05230649(A)
申请公布日期
1993.09.07
申请号
JP19920069214
申请日期
1992.02.18
申请人
SHIN ETSU CHEM CO LTD
发明人
EJIMA MASAKI;YOSHIDA IKUO;FUKUDA KUNIO;YAMAMURA KAZUICHI;SAKAGUCHI ARATA
分类号
C23C14/44;C23C14/35;H01L21/203;H01L21/285
主分类号
C23C14/44
代理机构
代理人
主权项
地址
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