发明名称 EXTERNAL APPEARANCE INSPECTING DEVICE AND METHOD FOR SEMICONDUCTOR ELEMENT
摘要 PURPOSE:To provide an external appearance inspecting device and a method thereof for semiconductor elements by which an inspecting time can be shortened without complicating the inspecting device. CONSTITUTION:An external appearance inspecting device and a method thereof for semiconductor elements are composed of a CCD camera 2 arranged above a continuous lead frame 1, an image processing device 3 connected to the CCD camera 2 and a data processing device 4 connected to the image processing device 3, and a grouped semiconductor element 10 is observed/read simultaneously by means of the CCD camera 2, and is converted into an image. Next, the quality of individual semiconductor elements 10 is discriminated by means of the image processing device 3 according to this read image, and information formed of the discrimination on this quality are stored with the respective grouped semiconductor elements 10 existing in the same image as the read image.
申请公布号 JPH05232034(A) 申请公布日期 1993.09.07
申请号 JP19920082705 申请日期 1992.03.04
申请人 SONY CORP 发明人 OKAWACHI HIROKI;OSHIMA NOBUO
分类号 G01N21/88;G01N21/956;G06T1/00;H01L21/66 主分类号 G01N21/88
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