HEAT TYPE FLOWRATE DETECTOR

摘要

PURPOSE:To obtain a heat type flowrate detector having small scattering of flowrate characteristics and ageing change and good responsibility and reliability. CONSTITUTION:A chip for flow velocity detection in a heat type flowrate detector and a plurality of penetration holes 4 are provided around the base plate 1 having a heater element 2. With the plurality of beams formed around the heater element 2 by the penetration holes 4, the base plate 1 in time heater element region is elastically supported.