| 摘要 |
PURPOSE: To measure the depth and width of a trench in a sample by containing the data signal of the physical relationship of a probe to a sample, vibrating the probe on the sample surface and obtaining output signals. CONSTITUTION: Wideband white light from a white light source 34 passes a beam splitter 38, is reflected by a sample 12, returns to the beam splitter 38, and is detected by a video camera 36, etc. The location of a probe can be detected by using an optical microscope. A bimorph piezoelectric element 48 vibrates an installed cantilever 16, and the cantilever 16 vibrates a probe tip 14 in the direction of Z. And the bimorph piezoelectric element 48 moves in parallel in the direction of 'Z', lowers the tip a trench 40 over the sample or a target 12 or to a trace width 42, and follows the surface geometry of the sample 12 when the sample 12 is scanned. The whole the profile of the surface area can be mapped by moving the tip 14 across a trench 40, trace width 42 or both of them. |
