发明名称 DISCOLORING PREVENTIVE SOLUTION FOR COPPER
摘要 PURPOSE:To establish a countermeasure to prolong the service life of copper discoloring preventive solution consisting of acidic solution of inorganic acid and/or organic acid contg. a benzotriazole derivative of 5-methyl-1H- benzotriazole, etc., as a coloring preventive. CONSTITUTION:Copper discoloring preventive solution is provided characterized in that an EDTA chelate agent is added to acidic solution (optionally including a pH buffer) of inorganic acid and/or organic acid contg. as a discoloring preventive a benzotriazole derivative of 5-methyl-1H-benzotriazole and/or 5,6-dimethyl-1 H-benzotriazole. The EDTA chelate agent may be added during use. The EDTA chelate agent is dissolved in liquid so that copper may be stabilized in the copper discoloring preventive solution, preventing the benzotriazole derivative from being adsorbed on the surface of silver. The specified example: 2.5g/l potassium pyrophosphate, 50mg/l, 5-methyl-1H-benzotriazole, 1g/l EDTA, and pH 4-6.
申请公布号 JPH05230675(A) 申请公布日期 1993.09.07
申请号 JP19920069806 申请日期 1992.02.19
申请人 NIKKO KYODO CO LTD 发明人 KONASE TAKASHI;SUZUKI KEIJIRO;HISUMI YOSHIYUKI
分类号 C23F11/00;C23F11/04;C23F11/10;C23F11/14;H01L21/60 主分类号 C23F11/00
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