| 发明名称 |
Ion beam etching of metal oxide ceramics |
| 摘要 |
An improved infrared detector element and an improved method for manufacturing same is provided. A commercially available rough art wafer of ferroelectric material is ion milled under conditions which provide an extremely thin element with a near flawless detection surface.
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| 申请公布号 |
US5242537(A) |
申请公布日期 |
1993.09.07 |
| 申请号 |
US19910693470 |
申请日期 |
1991.04.30 |
| 申请人 |
THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OF THE NAVY |
发明人 |
NELSON, ELIZABETH H. |
| 分类号 |
H01L37/02 |
主分类号 |
H01L37/02 |
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