DRY ETCHING DEVICE,申请号JP19920072788-传众专利搜索

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发明名称	DRY ETCHING DEVICE
摘要
申请公布号	JPH05230673(A)	申请公布日期	1993.09.07
申请号	JP19920072788	申请日期	1992.02.24
申请人	ULVAC SEIMAKU KK	发明人	HAYASHI ATSUSHI
分类号	C23F4/00;H01L21/302;H01L21/3065;H01L21/677;H01L21/68	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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