METHOD OF PREPARING OXIDE SUPERCONDUCTING THIN FILM

摘要

Provided herein is a method of efficiently preparing a thin film having a higher critical temperature as to an oxide superconducting material containing T?. A thin film of an oxide containing T? is formed and then heat treated at a temperature of about 850 to 950.degree.C for a short time, and thereafter further heat treated at a temperature, which is lower than the preceding heat treatment temperature, of at least about 750.degree.C for a long time. The thin film is heat treated in an atmosphere having an oxygen partial pressure of not more than about 0.1 atm. In formation of a T? superconducting thin film, on the other hand, a 1212 phase layer is reacted with an amorphous Ca-Cu-O layer to form a 1223 phase layer, or a layer containing volatile metal elements (T?, Bi and Pb, for example) and oxygen is reacted with another layer containing other elements than the volatile metal elements to form a superconducting film having a high critical temperature.