发明名称 DICING DEVICE AND SETTING METHOD THEREOF
摘要 <p>PURPOSE:To shorten the time to be required for the setting operation of a grinding wheel blade (blade), and reduce the abrasion quantity of the blade during the setting operation in a dicing device and the setting method thereof. CONSTITUTION:A dicing device provided with a rotating grinding wheel blade 1, which is obtained by fixing the grinding grains with the binder, and a cutting liquid supply means 2 for supplying the cutting liquid to the contact part of the grinding wheel blade 1 and the material 10 to be processed. The dicing device is also provided with an accelerator supply means 3 for supplying the accelerator, which accelerates the melt of the binder of the grinding wheel blade 1, in the cutting liquid and an accelerator supply control means 4 for controlling the accelerator supply means 3 so that the accelerator is supplied at the only time of processing a dummy member as the material 10 to be processed to bring the surface condition of the grinding wheel blade 1 appropriate for the processing.</p>
申请公布号 JPH05228836(A) 申请公布日期 1993.09.07
申请号 JP19920033340 申请日期 1992.02.20
申请人 TOKYO SEIMITSU CO LTD;ASAHI DAIYAMONDO KOGYO KK 发明人 TANMACHI MITSUO;TSUCHISHIMA JIRO;YOTSUTSUJI KAZUHIRO
分类号 B24B27/06;B24B53/00;B28D5/00;B28D7/02;H01L21/301;H01L21/78 主分类号 B24B27/06
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