SURFACE INSPECTING METHOD AND DEVICE THEREOF,申请号JP19920072166-传众专利搜索

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发明名称	SURFACE INSPECTING METHOD AND DEVICE THEREOF
摘要
申请公布号	JPH05232042(A)	申请公布日期	1993.09.07
申请号	JP19920072166	申请日期	1992.02.24
申请人	NEC CORP	发明人	TAKESUE HIROTO
分类号	G01B11/30;G01N21/64;G01N21/88;G01N21/93;G01N21/94;H01H11/04;H01H49/00;H05K3/26	主分类号	G01B11/30
代理机构		代理人
主权项
地址

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