PRODUCTION OF MICROTECHNOLOGICAL ELEMENT WITH TWO DEGREES OF FREEDOM,申请号JP19920169503-传众专利搜索

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发明名称	PRODUCTION OF MICROTECHNOLOGICAL ELEMENT WITH TWO DEGREES OF FREEDOM
摘要
申请公布号	JPH05230680(A)	申请公布日期	1993.09.07
申请号	JP19920169503	申请日期	1992.06.26
申请人	XEROX CORP	发明人	IGOORU AI BORU
分类号	C23F17/00;B23P11/00;B23P15/00;B81C1/00;C23F1/00;F16C33/14;G03F7/00;H01H1/00;H01L21/302;H01L21/306	主分类号	C23F17/00
代理机构		代理人
主权项
地址

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