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经营范围
发明名称
SPUTTERING DEVICE
摘要
申请公布号
JPH05230652(A)
申请公布日期
1993.09.07
申请号
JP19910029431
申请日期
1991.01.30
申请人
SHIBAURA ENG WORKS CO LTD;SONY CORP
发明人
SHIMOUNE YUUICHIROU;IKEDA JIRO
分类号
C23C14/34;C23C14/54;H01J37/32
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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