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发明名称
WAFER INSPECTING DEVICE
摘要
申请公布号
JPH05232031(A)
申请公布日期
1993.09.07
申请号
JP19920009607
申请日期
1992.01.23
申请人
NEC CORP
发明人
MIHASHI HIDEO
分类号
G01B11/24;G01B11/30;G01N21/88;G01N21/956;H01L21/66
主分类号
G01B11/24
代理机构
代理人
主权项
地址
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