发明名称 METHOD AND APPARATUS FOR MEASURING THREE-DIMENSIONAL CONFIGURATION OF WIRE-SHAPED OBJECT IN A SHORT TIME
摘要 A method of measuring a wire-shaped object (1, 11) comprises a scanning step of scanning a light beam (LB) on the surface of the wire-shaped object (1, 11), a detection step of detecting a reflected light (RL) reflected from the surface of the wire-shaped object (1, 11) by a plurality of optical sensor cells (21), the optical sensor cells (21) being mounted on an inner wall (2a) of a reflected light detection unit (2, 20) located over the wire-shaped object (1, 11); and a measurement step of measuring a three-dimensional configuration of the wire-shaped object (1, 11) in accordance with output signals from the plurality of optical sensor cells (21), whereby, the three-dimensional configuration of the wire-shaped object (1, 11) is automatically measured in a short time. <IMAGE>
申请公布号 US5243406(A) 申请公布日期 1993.09.07
申请号 US19910725673 申请日期 1991.07.03
申请人 FUJITSU LIMITED 发明人 ANDO, MORITOSHI;TSUKAHARA, HIROYUKI;OSHIMA, YOSHITAKA
分类号 H01L21/00;H01L21/66;H05K13/08 主分类号 H01L21/00
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