DEVICE FOR MEASURING THREE-DIMENSIONAL SHAPE,申请号JP19920026347-传众专利搜索

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发明名称	DEVICE FOR MEASURING THREE-DIMENSIONAL SHAPE
摘要
申请公布号	JPH05231834(A)	申请公布日期	1993.09.07
申请号	JP19920026347	申请日期	1992.02.13
申请人	NEC CORP	发明人	TANAKA RYOJI
分类号	G01B11/24;H01L21/66;H01L23/50	主分类号	G01B11/24
代理机构		代理人
主权项
地址

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