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发明名称
MANUFACTURE OF PROBES FOR SCAN TYPE TUNNEL MICROSCOPE
摘要
申请公布号
JPH05230672(A)
申请公布日期
1993.09.07
申请号
JP19920037967
申请日期
1992.02.25
申请人
HITACHI CONSTR MACH CO LTD
发明人
OGATA KOJIRO;MITSUYANAGI NAOKI;TADA NOBUHIKO;SHIMOMURA YOSHIAKI;SAKURAI SHIGEYUKI;HANEDA MITSUAKI
分类号
C23C26/00;G01B7/34;G01Q60/16;H01J9/14;H01J37/28
主分类号
C23C26/00
代理机构
代理人
主权项
地址
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