| 摘要 |
PURPOSE:To improve the efficiency of removing the stains of inorg. matter in particular by irradiating the surface of single glass substrates with specific UV rays just prior to wet washing using pure water. CONSTITUTION:U-shaped low-pressure mercury lamps 2 having two peaks; 184.9nm and 253.7nm wavelengths are arrayed in a UV irradiation unit 1. The single glass substrates 3 which are put into a washing cassette 4 and are formed with electrode patterns on the surface are supplied by one sheet each and are irradiated with UV rays. Several sheets of the glass substrates 3 are thereafter fed together with the washing cassette 4 by automatic transportation into an ultrasonic washing chamber of a 1st washing chamber 5 using the pure water by each washing cassette 4. The substrates are then fed into an ultrasonic washing chamber of a 2nd washing chamber 6 likewise using the pure water and are likewise washed. Finally, the substrates are subjected to vapor drying with IPA (isopropyl alcohol) in a drying chamber 7 of the 3rd chamber and thereafter, a polyimide film is formed as oriented films thereon by flexographic printing.
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