MANUFACTURE OF SEMICONDUCTOR SUBSTRATE,申请号JP19920029352-传众专利搜索

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发明名称	MANUFACTURE OF SEMICONDUCTOR SUBSTRATE
摘要
申请公布号	JPH05226307(A)	申请公布日期	1993.09.03
申请号	JP19920029352	申请日期	1992.02.17
申请人	NIPPON TELEGR & TELEPH CORP <NTT>	发明人	KUWAGAKI MAMORU
分类号	H01L21/304;H01L21/02;H01L27/12	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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