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发明名称
Process and device for surface-modification by physico-chemical reactions of gases or vapours on surfaces, using highly-charged ions
摘要
申请公布号
AU3452393(A)
申请公布日期
1993.09.03
申请号
AU19930034523
申请日期
1993.01.30
申请人
HELMUT HOFFMEISTER
发明人
JURGEN ANDRA
分类号
C23C16/26;C23C16/27;C23C16/34;C23C16/40;C23C16/44;C23C16/48;C23C16/50;C23C16/511;C23F4/00;C30B33/00;H01J37/317;(IPC1-7):C23C16/48
主分类号
C23C16/26
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代理人
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