发明名称 WIRE GUIDE AND WIRE BONDING DEVICE USING THE SAME
摘要 PURPOSE:To contribue to simplification and quickness of a wire passing work in a bonding tool. CONSTITUTION:A gas jetting device 41, which jets out gas almost in parallel with the tangential direction of the virtual circle 50 having the tube center of a bonding tool 7 as the center, is provided in the vicinity of the wire receptacle part of the bonding tool 7. A guide wall is formed by the above-mentioned jetting gas, and a wire 9 is effectively guided.
申请公布号 JPH05226401(A) 申请公布日期 1993.09.03
申请号 JP19920058860 申请日期 1992.02.13
申请人 KAIJO CORP 发明人 URA MASANAO
分类号 H01L21/60 主分类号 H01L21/60
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