| 摘要 |
PURPOSE:To make it possible to conduct a wire bonding operation while the bending of the wire itself is being removed by annealing by a method wherein a tube body, with which the wire is passed through the path of a bonding wire, and a heating means, with which the wire in the tube body is heated up, are provided. CONSTITUTION:A tube body (glass tube) 20 is provided, through which a wire (gold wire) 2 is passed between a wire guide 4 and a cut clamp 5. In order to heat up the gold wire in the above-mentioned glass tube 20, a heater coil 21, which is wound around the outer circumference of the glass tube 20, is provided and a temperature control unit 22, with which the temperature in the glass tube will be controlled by applying a high frequency current to the coil 21, is provided. The gold wire 2 is heated up in the glass tube 20 by a tension mechanism 3 with which gas is allowed to flow out at constant pressure. As a result, the bending of the wire itself can be removed by annealing. Also, a loop-type wire can be obtained even when the wire is long. |
