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发明名称
SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要
申请公布号
JPH05226661(A)
申请公布日期
1993.09.03
申请号
JP19920029561
申请日期
1992.02.17
申请人
MITSUBISHI ELECTRIC CORP
发明人
HARADA MANA
分类号
H01L21/225;H01L21/336;H01L29/06;H01L29/08;H01L29/739;H01L29/78
主分类号
H01L21/225
代理机构
代理人
主权项
地址
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