摘要 |
<p>PURPOSE:To provide a producing method for a color filter by completely removing the residue of a coloring resin left on the surface of a glass base plate in a photolithography process, thereby improving production efficiency. CONSTITUTION:In the producing method for the color filter by applying the coloring resin made by dispersing at least a coloring material in a transparent photosensitive resin on the base plate 1, executing exposure and development in the photolithography process after heating and temporarily hardening and by heating again and main hardening, 2-20J/cm<2> ultraviolet UV-beam 4 is radiated on the surface of the substrate in the atmosphere and the residue left on the surface of the substrate 1 in the developing process is removed.</p> |