发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要 PURPOSE:To make it possible to prevent a punch through and to increase the capacity of a capacitor. CONSTITUTION:Firstly, a dent for element isolation and a dent for transistor formation are formed simultaneously and the dent for transistor formation is so formed that a gate electrode 5 may be inserted into. Secondly, a pad electrode 10p constituted of a conductor layer which was formed in one and the same process as a storage node electrode 10 was formed is placed between a bit line 14 and a source and a drain region 6a and 6b, to which the bit line 14 is connected. And, thirdly, the storage node electrodes are located checkerwise.
申请公布号 JPH05226603(A) 申请公布日期 1993.09.03
申请号 JP19920047155 申请日期 1992.03.04
申请人 TOSHIBA CORP 发明人 YAMADA TAKASHI;HAMAMOTO TAKESHI;OZAKI TORU;HORIGUCHI FUMIO;NITAYAMA AKIHIRO
分类号 H01L27/04;H01L21/822;H01L21/8242;H01L27/10;H01L27/108 主分类号 H01L27/04
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