发明名称 PRODUCTION OF COLOR FILTER
摘要 PURPOSE:To provide a producing method for a color filter by completely removing residue of a coloring resin left on the surface of a glass base plate in a photolithography process, thereby improving production efficiency. CONSTITUTION:In the producing method for the color filter by applying the coloring resin made by dispersing at least a coloring material in a transparent photosensitive resin on the substrate 1, executing exposure and development in the photolithography process after heating and temporarily hardening and by heating again and main hardening, 5-20J/cm<2> ultraviolet UV beams 6 are emitted on the surface of the base plate in the atmosphere after main hardening process to remove the residue left on the surface of the base plate 1 in the developing process.
申请公布号 JPH05224015(A) 申请公布日期 1993.09.03
申请号 JP19920055990 申请日期 1992.02.07
申请人 CANON INC 发明人 ISHIWATARI KAZUYA;YOSHIOKA TOSHIFUMI
分类号 G02B5/20;G02F1/1335 主分类号 G02B5/20
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