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发明名称
DEVICE AND METHOD FOR POSITIONING SEMICONDUCTOR FRAME
摘要
申请公布号
JPH05226381(A)
申请公布日期
1993.09.03
申请号
JP19920030610
申请日期
1992.02.18
申请人
MITSUBISHI ELECTRIC CORP
发明人
SATO FUMIAKI
分类号
H01L21/50
主分类号
H01L21/50
代理机构
代理人
主权项
地址
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