METHOD AND EQUIPMENT FOR MANUFACTURING INSULATING FILM,申请号JP19920024173-传众专利搜索

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发明名称	METHOD AND EQUIPMENT FOR MANUFACTURING INSULATING FILM
摘要
申请公布号	JPH05226327(A)	申请公布日期	1993.09.03
申请号	JP19920024173	申请日期	1992.02.12
申请人	FUJI ELECTRIC CO LTD	发明人	SASAKI MITSUO
分类号	C23C16/50;C23C16/511;H01L21/205;H01L21/31;H01L21/316;H01L21/768	主分类号	C23C16/50
代理机构		代理人
主权项
地址

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