摘要 |
PURPOSE: To obtain a small-sized and strong accelerometer having improved reliability, response and temp. insensitivity. CONSTITUTION: An accelerometer unit 16 has the capacitor detection plate 36.5 and source plate connector 36.6 provided on the inside and outside of the groove 36.1 of a base layer 36 and a metal plate member 38 has an attaching part 38.1, a source plate part 38.2 forming a capacitor and an elastic beam 38.3 responding to acceleration force to be movable with respect to a detection plate. An electric insulating housing base 12 has a base layer and the integral pin 14 extending through the opening 18.4 of an electric circuit means 18 and a circuit means is attached so as to be positioned above an accelerometer unit and a conductive adhesive is introduced through the guide hole of the gasket 22 between an accelerometer and a circuit unit. |