| 摘要 |
PURPOSE:To hold a photomask different in thickness with one holder. CONSTITUTION:A stopper 14 protruding to a mask inserting hole 13 is provided at the surface side of a mask holder main body 11. The mask holder main body 11 is provided to be freely movable forwards and backwards with a mask pressing member 15 having a pressing tool 16, which is energized by a compressing coil spring 18. A slope in contact with the side part of the photomask 12 is formed at the tip part of the pressing tool 16. The photomask 12 is positioned in the mask inserting hole 13 so that the upper side of the photomask 12 is abutted on the stopper 14 and is held by the mask pressing member 15 at the mask holder 11. The photomask is positioned so that the upper side is always at a specific position even if the thickness thereof is different. |
