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经营范围
发明名称
ELECTRON NEUTRALIZER
摘要
申请公布号
JPH05225949(A)
申请公布日期
1993.09.03
申请号
JP19920030607
申请日期
1992.02.18
申请人
MITSUBISHI ELECTRIC CORP
发明人
EGUCHI MASANAO
分类号
H01J37/317;H01L21/265
主分类号
H01J37/317
代理机构
代理人
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