发明名称 SEMICONDUCTOR MEMORY DEVICE
摘要 PURPOSE:To reduce the size of a memory cell without using the metal interconnection processing technology by making a pitch of a metal interconnection which passes on the memory cell larger than that of a word line. CONSTITUTION:A word line is divided to such an extent that no notice should be taken of a wiring delay due to a resistance of the word line even if the word line is not backed with a metal interconnection. Then, word line driving circuits 3a-5d, each of which is constituted of the minimum necessary circuits to drive the word line, are connected to the divided word lines respectively. A word line is selected by metal interconnections XSWO-2, XSWO-2 which run on a memory cell parallelly with the word line at a pitch twice the word line or larger and metal interconnections RAO-3 which run on the word line driving circuit vertically with the word line.
申请公布号 JPH05226613(A) 申请公布日期 1993.09.03
申请号 JP19920000038 申请日期 1992.01.06
申请人 NIPPON ELECTRIC CO 发明人 NODA KENJI
分类号 G11C11/407;G11C11/401;H01L21/8242;H01L27/10;H01L27/108 主分类号 G11C11/407
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